Deposition and characterization of AlN thin films obtained by radio frequency reactive magnetron sputtering

Published 2014 View Full Article

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Title
Deposition and characterization of AlN thin films obtained by radio frequency reactive magnetron sputtering
Authors
Keywords
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Journal
CANADIAN JOURNAL OF PHYSICS
Volume 92, Issue 7/8, Pages 940-942
Publisher
Canadian Science Publishing
Online
2014-01-18
DOI
10.1139/cjp-2013-0556
References
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