Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

Published 2012 View Full Article

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Title
Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 15, Pages 4863-4870
Publisher
Elsevier BV
Online
2012-03-17
DOI
10.1016/j.tsf.2012.03.015

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