Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications

Published 2008 View Full Article

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Title
Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 12, Pages 125705
Publisher
IOP Publishing
Online
2008-02-22
DOI
10.1088/0957-4484/19/12/125705

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