In-operando hard X-ray photoelectron spectroscopy study on the impact of current compliance and switching cycles on oxygen and carbon defects in resistive switching Ti/HfO2/TiN cells
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Title
In-operando hard X-ray photoelectron spectroscopy study on the impact of current compliance and switching cycles on oxygen and carbon defects in resistive switching Ti/HfO2/TiN cells
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 20, Pages 204509
Publisher
AIP Publishing
Online
2014-05-29
DOI
10.1063/1.4879678
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Related references
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- (2012) Xavier Cartoixà et al. PHYSICAL REVIEW B
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- (2008) Ch. Wenger et al. MICROELECTRONIC ENGINEERING
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