Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
出版年份 2018 全文链接
标题
Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 113, Issue 2, Pages 022905
出版商
AIP Publishing
发表日期
2018-07-13
DOI
10.1063/1.5031134
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