Enhanced ferroelectricity in epitaxial Hf0.5Zr0.5O2 thin films integrated with Si(001) using SrTiO3 templates

标题
Enhanced ferroelectricity in epitaxial Hf0.5Zr0.5O2 thin films integrated with Si(001) using SrTiO3 templates
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 114, Issue 22, Pages 222901
出版商
AIP Publishing
发表日期
2019-06-05
DOI
10.1063/1.5096002

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