Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation
出版年份 2020 全文链接
标题
Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation
作者
关键词
HiPIMS discharge, Expanding cathode sheath, Electron transport, Langmuir probe, 2D PIC-MCC simulation
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 403, Issue -, Pages 126371
出版商
Elsevier BV
发表日期
2020-09-02
DOI
10.1016/j.surfcoat.2020.126371
参考文献
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