Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

出版年份 2012 全文链接

标题

作者

关键词

出版物

Volume 21, Issue 4, Pages 045004

出版商

IOP Publishing

发表日期

2012-06-15

DOI

10.1088/0963-0252/21/4/045004

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