Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling

标题
Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 255, Issue -, Pages 52-61
出版商
Elsevier BV
发表日期
2013-12-06
DOI
10.1016/j.surfcoat.2013.11.050

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