Cross-field ion transport during high power impulse magnetron sputtering

标题
Cross-field ion transport during high power impulse magnetron sputtering
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 3, Pages 035021
出版商
IOP Publishing
发表日期
2008-07-08
DOI
10.1088/0963-0252/17/3/035021

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