2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit

标题
2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2018-09-04
DOI
10.1088/1361-6595/aadebe

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