Plasma Parameters in a Pre-Ionized HiPIMS Discharge Operating at Low Pressure

标题
Plasma Parameters in a Pre-Ionized HiPIMS Discharge Operating at Low Pressure
作者
关键词
-
出版物
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 38, Issue 11, Pages 3007-3015
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-09-16
DOI
10.1109/tps.2010.2069572

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