Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges

标题
Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 23, Issue 6, Pages 065043
出版商
IOP Publishing
发表日期
2014-10-28
DOI
10.1088/0963-0252/23/6/065043

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