Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3Thin Films on PET Substrates
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Title
Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3Thin Films on PET Substrates
Authors
Keywords
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Journal
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 10-11-12, Pages 380-387
Publisher
Wiley
Online
2014-10-14
DOI
10.1002/cvde.201407126
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