Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates

Published 2008 View Full Article

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Title
Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 20, Pages 6410-6415
Publisher
Elsevier BV
Online
2008-04-13
DOI
10.1016/j.apsusc.2008.04.015

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