An atomic layer deposition process for moving flexible substrates

Published 2011 View Full Article

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Title
An atomic layer deposition process for moving flexible substrates
Authors
Keywords
-
Journal
CHEMICAL ENGINEERING JOURNAL
Volume 171, Issue 1, Pages 345-349
Publisher
Elsevier BV
Online
2011-04-29
DOI
10.1016/j.cej.2011.03.097

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