Atomic layer deposition of tin oxide films using tetrakis(dimethylamino) tin

Published 2008 View Full Article

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Title
Atomic layer deposition of tin oxide films using tetrakis(dimethylamino) tin
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 2, Pages 244-252
Publisher
American Vacuum Society
Online
2008-08-08
DOI
10.1116/1.2835087

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