Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3Thin Films on PET Substrates
出版年份 2014 全文链接
标题
Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3Thin Films on PET Substrates
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 10-11-12, Pages 380-387
出版商
Wiley
发表日期
2014-10-14
DOI
10.1002/cvde.201407126
参考文献
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