Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties
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Title
Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties
Authors
Keywords
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Journal
CHEMICAL VAPOR DEPOSITION
Volume 19, Issue 4-6, Pages 204-212
Publisher
Wiley
Online
2013-05-22
DOI
10.1002/cvde.201207045
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