Deposition of thin films of organic–inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition

Published 2010 View Full Article

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Title
Deposition of thin films of organic–inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition
Authors
Keywords
-
Journal
DALTON TRANSACTIONS
Volume 39, Issue 48, Pages 11628
Publisher
Royal Society of Chemistry (RSC)
Online
2010-11-01
DOI
10.1039/c0dt00817f

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