Investigations of dopants introduction in hafnia: Electronic properties, diffusion, and their role on the gate leakage current

Published 2008 View Full Article

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Title
Investigations of dopants introduction in hafnia: Electronic properties, diffusion, and their role on the gate leakage current
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 3, Pages 033709
Publisher
AIP Publishing
Online
2008-08-07
DOI
10.1063/1.2965193

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