Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel

标题
Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 2, Pages 025702
出版商
AIP Publishing
发表日期
2017-01-12
DOI
10.1063/1.4972979

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