Impact of Plasma Treatment on Reliability Performance for HfZrOx-Based Metal-Ferroelectric-Metal Capacitors

Title
Impact of Plasma Treatment on Reliability Performance for HfZrOx-Based Metal-Ferroelectric-Metal Capacitors
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 1, Pages 87-90
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-11-09
DOI
10.1109/led.2017.2771390

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