Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
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Title
Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 19, Pages 191101
Publisher
AIP Publishing
Online
2016-05-19
DOI
10.1063/1.4949263
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