Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions

Published 2010 View Full Article

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Title
Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 5, Pages 1655-1661
Publisher
Elsevier BV
Online
2010-07-30
DOI
10.1016/j.tsf.2010.07.091

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