Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models

A kinetic model for stress generation in thin films grown from energetic vapor fluxes

(2016) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Role of atomic migration in nanocrystalline stability: Grain size and thin film stress states

(2015) Monica Kapoor et al.   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

Stress evolution during growth of 1-D island arrays: Kinetics and length scaling

(2015) E. Chason et al.   SCRIPTA MATERIALIA

Relating residual stress to thin film growth processes via a kinetic model and real-time experiments

(2015) Eric Chason et al.   THIN SOLID FILMS

Grain growth and complex stress evolution during Volmer–Weber growth of polycrystalline thin films

(2014) Hang Z. Yu et al.   ACTA MATERIALIA

Growth of patterned island arrays to identify origins of thin film stress

(2014) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Fast and slow stress evolution mechanisms during interruptions of Volmer-Weber growth

(2014) Hang Z. Yu et al.   JOURNAL OF APPLIED PHYSICS

Stress evolution in Si during low-energy ion bombardment

(2014) Yohei Ishii et al.   JOURNAL OF MATERIALS RESEARCH

Atom insertion into grain boundaries and stress generation in physically vapor deposited films

(2013) D. Magnfält et al.   APPLIED PHYSICS LETTERS

Understanding Residual Stress in Electrodeposited Cu Thin Films

(2013) Eric Chason et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Growth of whiskers from Sn surfaces: Driving forces and growth mechanisms

(2013) Eric Chason et al.   PROGRESS IN SURFACE SCIENCE

Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure

(2012) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Effect of adatom surface diffusivity on microstructure and intrinsic stress evolutions during Ag film growth

(2012) D. Flötotto et al.   JOURNAL OF APPLIED PHYSICS

Intrinsic stress in ZrN thin films: Evaluation of grain boundary contribution from in situ wafer curvature and ex situ x-ray diffraction techniques

(2012) L. E. Koutsokeras et al.   JOURNAL OF APPLIED PHYSICS

Real-time stress measurements in lithium-ion battery negative-electrodes

(2012) V.A. Sethuraman et al.   JOURNAL OF POWER SOURCES

A kinetic analysis of residual stress evolution in polycrystalline thin films

(2012) Eric Chason   THIN SOLID FILMS

Compositional dependent thin film stress states

(2010) B. Fu et al.   JOURNAL OF APPLIED PHYSICS

Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions

(2010) A. Fillon et al.   THIN SOLID FILMS

Stress behavior of electroplated Sn films during thermal cycling

(2009) Jae Wook Shin et al.   JOURNAL OF MATERIALS RESEARCH

Atomistic simulations of stress and microstructure evolution during polycrystalline Ni film growth

(2009) Chun-Wei Pao et al.   PHYSICAL REVIEW B

Compressive Stress Generation in Sn Thin Films and the Role of Grain Boundary Diffusion

(2009) Jae Wook Shin et al.   PHYSICAL REVIEW LETTERS

Direct Evidence for Effects of Grain Structure on Reversible Compressive Deposition Stresses in Polycrystalline Gold Films

(2009) J. Leib et al.   PHYSICAL REVIEW LETTERS

Stress in Evaporated and Sputtered Thin Films – A Comparison

(2009) R. Koch   SURFACE & COATINGS TECHNOLOGY

In situ stress evolution during magnetron sputtering of transition metal nitride thin films

(2008) G. Abadias et al.   APPLIED PHYSICS LETTERS

Whisker formation in Sn and Pb–Sn coatings: Role of intermetallic growth, stress evolution, and plastic deformation processes

(2008) E. Chason et al.   APPLIED PHYSICS LETTERS

Investigation of stress and morphology in electrodeposited copper nanofilms by cantilever beam method and in situ electrochemical atomic force microscopy

(2008) S. Ahmed et al.   JOURNAL OF APPLIED PHYSICS

Mechanisms of stress generation and relaxation during pulsed laser deposition of epitaxial Fe–Pd magnetic shape memory alloy films on MgO

(2008) Tobias Edler et al.   NEW JOURNAL OF PHYSICS

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

(2008) G.C.A.M. Janssen et al.   THIN SOLID FILMS