Intrinsic stress in ZrN thin films: Evaluation of grain boundary contribution from in situ wafer curvature and ex situ x-ray diffraction techniques

The origin of stresses in magnetron-sputtered thin films with zone T structures

(2010) R. Daniel et al.   ACTA MATERIALIA

Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–N

(2010) G. Abadias et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Stress and microstructure evolution in thick sputtered films

(2009) Andrew J. Detor et al.   ACTA MATERIALIA

Understanding the relation between stress and surface morphology in sputtered films: Atomistic simulations and experiments

(2009) Luis A. Zepeda-Ruiz et al.   APPLIED PHYSICS LETTERS

Surface morphology evolution during sputter deposition of thin films – lattice Monte Carlo simulations

(2009) Luis A. Zepeda-Ruiz et al.   JOURNAL OF CRYSTAL GROWTH

Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate

(2009) S Mahieu et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se2 solar cells

(2009) S. Schleussner et al.   THIN SOLID FILMS

Stress evolution in magnetron sputtered Ti–Zr–N and Ti–Ta–N films studied by in situ wafer curvature: Role of energetic particles

(2009) G. Abadias et al.   THIN SOLID FILMS

In situ stress evolution during magnetron sputtering of transition metal nitride thin films

(2008) G. Abadias et al.   APPLIED PHYSICS LETTERS

Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment

(2008) Hsiao-Ming Tung et al.   MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING

Stress gradients in titanium nitride thin films

(2008) R. Machunze et al.   SURFACE & COATINGS TECHNOLOGY

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

(2008) G.C.A.M. Janssen et al.   THIN SOLID FILMS

Stress and preferred orientation in nitride-based PVD coatings

(2007) G. Abadias   SURFACE & COATINGS TECHNOLOGY