Stress in Evaporated and Sputtered Thin Films – A Comparison

Published 2009 View Full Article

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Title
Stress in Evaporated and Sputtered Thin Films – A Comparison
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 204, Issue 12-13, Pages 1973-1982
Publisher
Elsevier BV
Online
2009-10-04
DOI
10.1016/j.surfcoat.2009.09.047

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