Effects of ultrasonic amplitude on sapphire ultrasonic vibration assisted chemical mechanical polishing by experimental and CFD method
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Title
Effects of ultrasonic amplitude on sapphire ultrasonic vibration assisted chemical mechanical polishing by experimental and CFD method
Authors
Keywords
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Journal
MECHANICS OF ADVANCED MATERIALS AND STRUCTURES
Volume -, Issue -, Pages 1-18
Publisher
Informa UK Limited
Online
2021-11-05
DOI
10.1080/15376494.2021.1992691
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