Research on a new method for optimizing surface roughness of cavitation abrasive flow polishing monocrystalline silicon
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Title
Research on a new method for optimizing surface roughness of cavitation abrasive flow polishing monocrystalline silicon
Authors
Keywords
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Journal
The International Journal of Advanced Manufacturing Technology
Volume 113, Issue 5-6, Pages 1649-1661
Publisher
Springer Science and Business Media LLC
Online
2021-02-11
DOI
10.1007/s00170-021-06667-6
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