Preparation of a novel catalyst (SoFe III ) and its catalytic performance towards the removal rate of sapphire substrate during CMP process

Published 2018 View Full Article

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Title
Preparation of a novel catalyst (SoFe III ) and its catalytic performance towards the removal rate of sapphire substrate during CMP process
Authors
Keywords
-
Journal
TRIBOLOGY INTERNATIONAL
Volume 120, Issue -, Pages 99-104
Publisher
Elsevier BV
Online
2017-12-13
DOI
10.1016/j.triboint.2017.12.016

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