Preparation of flower-shaped silica abrasives by double system template method and its effect on polishing performance of sapphire wafers

Published 2019 View Full Article

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Title
Preparation of flower-shaped silica abrasives by double system template method and its effect on polishing performance of sapphire wafers
Authors
Keywords
Flower-shaped silica abrasive, Double system template method, Chemical mechanical polishing, Sapphire wafers
Journal
CERAMICS INTERNATIONAL
Volume 45, Issue 7, Pages 8471-8476
Publisher
Elsevier BV
Online
2019-01-27
DOI
10.1016/j.ceramint.2019.01.158

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