Article
Chemistry, Physical
Mufang Zhou, Yuanyao Cheng, Min Zhong, Wenhu Xu
Summary: This paper explores the effects of ultrasonic vibration assisted chemical mechanical polishing (UV-CMP) on sapphire polishing, including factors such as pad material, abrasive material and size, and slurry pH value. The study shows that UV-CMP achieves better polishing results with smaller and more uniform subsurface damage.
APPLIED SURFACE SCIENCE
(2023)
Article
Engineering, Mechanical
Wenhu Xu, Chong Sheng, Min Zhong
Summary: Molecular dynamics simulation was used to study the influence of ultrasonic vibration on sapphire polishing. It was found that optimal subsurface damage and removed atom effects could be achieved at specific frequency and amplitude. The effects of different frequencies and amplitudes on removed atoms and subsurface damage vary and need to be considered comprehensively.
TRIBOLOGY INTERNATIONAL
(2022)
Article
Engineering, Mechanical
Seungchul Hong, Deoksu Han, Keon-Soo Jang
Summary: The study focused on improving the planarization performance of dielectric layers by adjusting the zeta potential of particles and using surfactants, achieving a balance between performance and wafer defect density. High-quality wafer surfaces with rare defects, low roughness, and no contamination were achieved by tailoring the surface potential of colloidal silica nanoparticles and reducing defect concentration using fluorinated surfactant-induced intermolecular repulsion.
Article
Engineering, Mechanical
Jiangqin Ge, Yile Ren, Chen Li, Zhian Li, Sunting Yan, Ping Tang, Xinsheng Xu, Qiang Wang
Summary: To improve the efficiency of glass-based micro-channel polishing, an ultrasonic coupled abrasive jet polishing (UC-AJP) approach was proposed and a fluid mechanic model was established to reveal the ultrasonic enhancement law and optimal design parameters. The results showed that ultrasonic vibration significantly improved turbulent kinetic energy and impact erosion, leading to better jet stability and polishing efficiency. High-speed photography and polishing experiments confirmed that UC-AJP produced smoother surfaces and higher polishing efficiency compared to abrasive jet polishing. The optimal amplitude range in the UC-AJP process maximized the micro-channel polishing efficiency, attributed to the synergistic effect of pulse and cavitation in the pulsed abrasive jet formation.
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
(2023)
Article
Engineering, Manufacturing
Zhenyu Zhang, Jie Liu, Wei Hu, Lezhen Zhang, Wenxiang Xie, Longxing Liao
Summary: The novel green CMP technique effectively reduces the surface roughness of sapphire, achieving lower material removal rates and processing times, providing new perspectives for the semiconductor and microelectronic industries.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Engineering, Mechanical
Mufang Zhou, Min Zhong, Wenhu Xu
Summary: This study proposed a novel model of material removal rate (MRR) to explore the mechanism of sapphire ultrasonic-assisted chemical mechanical polishing (UA-CMP). Experimental and simulation results showed that the polishing mechanism of UA-CMP involves two modes: two-body wear and abrasive-impact. It was also found that increasing the polishing velocities can greatly improve the MRR.
Article
Chemistry, Physical
Wantang Wang, Baoguo Zhang, Yunhui Shi, Jiakai Zhou, Ru Wang, Nengyuan Zeng
Summary: The study combines mixed abrasive slurry (MAS) with photocatalytic effect in the SiC-CMP process to achieve efficient enhanced CMP technology. By using MAS consisting of Al2O3 and ZrO2 abrasives, a high material removal rate and surface roughness can be obtained under UV irradiation.
APPLIED SURFACE SCIENCE
(2022)
Article
Materials Science, Multidisciplinary
Haiyang Yu, Xiaoxue Tang, Xue Kong, Xing'ai Li, Yanpei Li, Mengfei Xi, Tongtong Chang, Danni Meng, Senlin Yang, Wanying Guo, Yanfeng Zhang, Zefang Zhang, Pinhua Rao
Summary: The chemical mechanical polishing of sapphire with different orientations shows varied MRR selectivity, which can be optimized with different abrasives. By preparing novel nanocomposite particles, the combination of mechanical and chemical effects can enhance the MRR of A-plane sapphire.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
(2021)
Article
Materials Science, Multidisciplinary
Mufang Zhou, Min Zhong, Wenhu Xu
Summary: This study investigated the effects of ultrasonic amplitude on slurry behavior in UV-CMP, and it was verified that the amplitude has a significant influence on the polishing effects. Additionally, ultrasonic vibration can significantly improve the MRR and roughness of sapphire surface.
MECHANICS OF ADVANCED MATERIALS AND STRUCTURES
(2022)
Article
Engineering, Mechanical
Liang Zhao, Kaiping Feng, Tianchen Zhao, Zhaozhong Zhou, Junkai Ding
Summary: This paper proposes a chromium oxide gel abrasive tool and investigates the effects of dispersant and slurry pH on slurry viscosity, as well as different sintering temperatures on the properties of the abrasive tool. The experimental results show that the gel abrasive tool exhibits better wear and processing effects under suitable conditions.
Article
Materials Science, Multidisciplinary
Hongguang Deng, Min Zhong, Wenhu Xu
Summary: This study investigated the effects of different dispersing reagents on ultrasonic assisted chemical mechanical polishing (UV-CMP) of sapphire. The results show that ultrasonic and polyethylene glycol can synergistically promote the chemical reaction and sapphire removal rate, while sodium polyacrylate and sodium hexametaphosphate will inhibit the chemical reaction. The optimal synergistic effects of chemical and mechanical action between abrasives and sapphire surface are achieved at a polyethylene glycol concentration of 0.2%.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
(2022)
Article
Chemistry, Analytical
Hyunseop Lee
Summary: Efforts have been made to improve the efficiency of semiconductor manufacturing by reducing the environmental burden. Chemical mechanical polishing (CMP), used in semiconductor production, has been studied to increase material removal rate (MRR) while reducing environmental impact. This study analyzed the effect of voltage on the chemical solution and studied the tribological material removal characteristics in abrasive-free CMP. The results showed that electrolytic ionization increased the dissolved oxygen (DO) and MRR, while also increasing frictional force and temperature during CMP.
Article
Engineering, Mechanical
Hongguang Deng, Min Zhong, Wenhu Xu
Summary: The effects of three different types of surfactants, including CTAB, SDBS, and AEO, on sapphire UV-CMP were investigated. AEO and SDBS caused abrasive agglomeration and slight particle size increase due to hydrogen bonding and electrostatic repulsion respectively. CTAB exhibited significant agglomeration of abrasive particles due to electrostatic attraction. The addition of 0.10% CTAB resulted in the best polishing effects with a sapphire MRR of 80.50 nm/min and a surface roughness of 0.200 nm.
TRIBOLOGY INTERNATIONAL
(2023)
Article
Optics
Yuan Qian, Wei Yang, Xiaoluo Yu, Chaoxu Chen
Summary: In this study, KDP is treated using fixed polishing in an anhydrous environment, with emphasis on analyzing the temperature field and determining optimal polishing parameters. A new material removal model is introduced to increase material removal depth, while maintaining surface roughness of the workpiece.
Article
Engineering, Electrical & Electronic
Jaewon Lee, Eungchul Kim, Chulwoo Bae, Hyunho Seok, Jinil Cho, Kubra Aydin, Taesung Kim
Summary: In this study, the surface of ceria was reduced by contact with hydrogen gas in a high temperature isothermal environment, resulting in the formation of surface hydroxyls. These hydroxyls then desorbed to form H2O and oxygen vacancies. The reduction reaction caused a change in the crystal structure, leading to a color change in ceria from yellow to blue. The reducing ability of hydrogen gas increased by 12.7% under isothermal conditions at 1000 degrees C, and the material removal rate (MRR) of reduced ceria improved by up to 37.7% compared to the original ceria.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Materials Science, Multidisciplinary
Yang Li, Zhongli Liu, Jianbin Luo, Shangzhou Zhang, Jianxun Qiu, Yongyong He
MATERIALS CHARACTERIZATION
(2019)
Article
Engineering, Mechanical
Xiangyu Ge, Tobias Halmans, Jinjin Li, Jianbin Luo
Article
Engineering, Mechanical
Wei Wang, Yongyong He, Jun Zhao, Junyuan Mao, Yutong Hu, Jianbin Luo
Article
Engineering, Mechanical
Shaohua Zhang, Yijun Qiao, Yuhong Liu, Liran Ma, Jianbin Luo
Article
Engineering, Multidisciplinary
Shiguang Peng, Lin Zhang, Guoxin Xie, Yue Guo, Lina Si, Jianbin Luo
COMPOSITES PART B-ENGINEERING
(2019)
Article
Chemistry, Multidisciplinary
Zhiwei Yu, Aisheng Song, Luzhao Sun, Yanglizhi Li, Lei Gao, Hailin Peng, Tianbao Ma, Zhongfan Liu, Jianbin Luo
Article
Chemistry, Physical
Yilong Ren, Guoxu Liu, Hang Yang, Tong Tong, Shaohang Xu, Lin Zhang, Jianbin Luo, Chi Zhang, Guoxin Xie
Article
Nanoscience & Nanotechnology
Jisen Tian, Xuan Yin, Jinjin Li, Wei Qi, Peng Huang, Xinchun Chen, Jianbin Luo
ACS APPLIED MATERIALS & INTERFACES
(2020)
Article
Chemistry, Multidisciplinary
Guangyan Chen, Jun Zhao, Kai Chen, Siyu Liu, Minyi Zhang, Yongyong He, Jianbin Luo
Article
Engineering, Mechanical
Yanfei Fang, Liran Ma, Jianbin Luo
TRIBOLOGY INTERNATIONAL
(2020)
Article
Engineering, Mechanical
Junyuan Mao, Guangyan Chen, Jun Zhao, Yongyong He, Jianbin Luo
Summary: The study found that graphene can effectively reduce the coefficient of friction and wear scar depth in the steel/copper friction pair, but it slightly increases under high loads; while in the steel/steel friction pair, graphene exhibits excellent tribological properties. Severe plastic deformation on the copper surface reduces the stability of the graphene tribofilm.
Review
Engineering, Mechanical
Feng He, Guoxin Xie, Jianbin Luo
Article
Chemistry, Physical
A. Temmler, D. Liu, J. Luo, R. Poprawe
APPLIED SURFACE SCIENCE
(2020)
Article
Engineering, Mechanical
Jianxun Xu, Ting Luo, Xinchun Chen, Chenhui Zhang, Jianbin Luo
TRIBOLOGY INTERNATIONAL
(2020)
Article
Materials Science, Multidisciplinary
Minyi Zhang, Jinhua Chen, Yang Li, Guangyan Chen, Yongyong He, Jianbin Luo
Article
Chemistry, Physical
Qi-Wen Chen, Ze-Qing Guo, Jian-Ping Zhou
Summary: Multifunctional continuous solid solutions NFMTO-x were successfully synthesized via a one-step hydrothermal method by controlling the ratio of Mg and Fe. The NFMTO-x materials exhibited enhanced visible light response, effective adsorption and photocatalytic degradation of organic pollutants, CO2 methanation capability, and easy recyclability due to their magnetic properties. This research provides a significant multifunctional material for water purification.
APPLIED SURFACE SCIENCE
(2024)
Review
Chemistry, Physical
George E. Stan, Maziar Montazerian, Adam Shearer, Bryan W. Stuart, Francesco Baino, John C. Mauro, Jose M. F. Ferreira
Summary: Bioactive glasses have the ability to form strong bonds with tissues and release therapeutic ions. However, their biomechanical compatibility limits their use in load-bearing applications. The use of magnetron sputtering technology to fabricate BG coatings shows promise in improving their efficacy and potential for application.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Zhaoxuan Wang, Zhicheng Yan, Zhigang Qi, Yu Feng, Qi Chen, Ziqi Song, Meng Huang, Peng Jia, Ki Buem Kim, Weimin Wang
Summary: The corrosion behavior of Fe-60 and Fe-83 ribbons in 0.6 M NaCl was studied. Fe-60 exhibited a local corrosion mode and formed a stable passivation film with higher corrosion resistance, while Fe-83 showed a combination of local and global corrosion modes and had lower corrosion resistance. Controlling the precipitation of nanocrystalline phases and increasing the POx content in the passivation film significantly improved the corrosion resistance of Fe-based glassy alloys.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Hao-Kai Peng, Sheng-Yen Zheng, Wei-Ning Kao, Ting-Chieh Lai, Kai-Sheun Lee, Yung- Hsien Wu
Summary: This study investigates the effects of high energy/fluence proton radiation on the performance of HfZrOx-based FeFETs memory with different Zr content. The results show that the characteristics of FeFETs are influenced by proton radiation, and the extent of the influence depends on the Zr content. FeFETs with 50% Zr content exhibit minimal changes in memory window and demonstrate good endurance and retention performance.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Zongyi Yue, Guangyi Wang, Zengguang Huang, Sihua Zhong
Summary: In this study, AZO and ITO films were successfully tuned as excellent passivation layers for c-Si surfaces, achieving effective minority carrier lifetime and outstanding optical properties through the optimization of annealing temperature and interfacial silicon oxide.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Martin Hruska, Jan Kejzlar, Jaroslav Otta, Premysl Fitl, Michal Novotny, Jakub Cizek, Oksana Melikhova, Matej Micusik, Peter Machata, Martin Vrnata
Summary: This paper presents a detailed study on the hydrogen sensing capabilities of highly nanoporous black gold films. The films exhibit fast response and recovery times at low temperatures. Different levels of nanoporosity were prepared and tested to investigate the sensing properties, and it was found that nanoporous black gold is suitable for hydrogen sensing. The sensitivity of the film depends on its nanoporosity.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Yupu Wang, Gaofeng Teng, Chun To Yiu, Junyi Zhu
Summary: In the study of BM-SCO and HSCO thin films, it was found that H vacancies tend to prefer sites near the external surface or oxygen vacancy channels (OVCs), while H interstitials prefer sites of oxygen on a layer that contains six-fold coordinated Co. These findings not only enrich the understanding of complex surface phenomena of defect formation but also provide an explanation for the reversibility during phase transformation.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Jiafeng Lu, Linping Teng, Qinxiao Zhai, Chunhua Wang, Matthieu Lancry, Ye Dai, Xianglong Zeng
Summary: In this study, we achieved full control of fiber nanograting orientation by manipulating laser polarization, and tailored space variant fiber nanogratings, which expanded the diversity in fiber nanograting engineering.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Yibo Liu, Yujie Tao, Yue Liu, Qi Sun, Qinrong Lin, Kexin Kang, Qinghua Zhang, Qingjie Sun
Summary: This study investigates the wettability of the Ti-Cu-Fe multi-metal system, specifically the wetting behaviors of CuSi3 droplets on TC4 and 304SS plates. The results show that the CO2 + Ar gas atmosphere significantly affects interfacial mass transfer, thus influencing the wettability of the systems.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Jimei Liu, Fei Wang, Rong Guo, Yuqi Liu, Mengyu Zhang, Jaka Sunarso, Dong Liu
Summary: This study developed Co/MXene composites with anti-corrosion properties by varying the cobalt content. These composites exhibited remarkable electromagnetic absorption performance and high resistance to corrosion under various corrosive conditions. The study also revealed the mechanism of electron transfer from cobalt to MXene and the electromagnetic dissipation behavior originated from polarization loss alone.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Moujie Huang, Yongsong Ma, Jingbo Yang, Lingyun Xu, Hangqi Yang, Miao Wang, Xin Ma, Xin Xia, Junhao Yang, Deli Wang, Chuang Peng
Summary: Strong metal-support interactions (SMSIs) are important for enhancing catalytic activities and stability in thermal catalysis. This study demonstrates a method to create SMSIs in electrocatalysis using carbon nanotubes and Ru nanoparticles, resulting in excellent catalytic activity and stability.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Ravi Trivedi, Brinti Mondal, Nandini Garg, Brahmananda Chakraborty
Summary: This study explores the potential of biphenylene as a nanocarrier for the delivery of the anticancer drug cisplatin. It is found that biphenylene offers physical stability, rapid release rate, solubility, and bio-compatibilities compared to other nanocarriers. The adsorption of cisplatin on the surface of biphenylene involves charge transfer from cisplatin to biphenylene. The drug is shown to be released at body temperature in an acidic environment. Biphenylene also exhibits excellent cytotoxicity activity and cellular uptake of the drug. Overall, biphenylene shows promise as a potential nanocarrier for cisplatin delivery.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Hyun Jeong, Hyeong Chan Suh, Ga Hyun Cho, Rafael Salas-Montiel, Hayoung Ko, Ki Kang Kim, Mun Seok Jeong
Summary: In this study, a potential platform to enhance Raman scattering and increase the number of observable Raman modes in monolayer transition metal dichalcogenides (TMDs) was proposed. The platform consisted of large-scale arrays of gold micropillars (MPs), which were able to enhance the Raman intensity of TMDs and make difficult-to-detect Raman modes observable. The platform showed great industrial advantages and wide applicability due to its low cost, simple process, large controllable area, and short process time.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Yasir Abbas, Shafqat Ali, Sajjad Ali, Waqar Azeem, Zareen Zuhra, Haoliang Wang, Mohamed Bououdina, Zhenzhong Sun
Summary: In this study, FeOx@SPNO-C core-shell nanospheres as a catalyst for degradation of sulfamethoxazole (SMX) were successfully synthesized. The synergistic interaction between FeOx and SPNO-C, high carbon charge density, and the presence of C = O groups and N/Fe-Nx sites were found to be key factors for the enhanced degradation of SMX.
APPLIED SURFACE SCIENCE
(2024)
Article
Chemistry, Physical
Qiaoting Yang, Yuxiao Gong, Yan Qian, Zhou-Qing Xiao, Serge Cosnier, Xue-Ji Zhang, Robert S. Marks, Dan Shan
Summary: This study proposes a hierarchical confinement strategy to design Prussian blue nanoparticles (PB NPs) with satisfactory electrocatalytic ability and stability. The catalytic synthesis of PB NPs is achieved through a hydrothermal process, and the as-prepared PB@NH2MIL exhibits efficient electronic transmission and enhanced electrocatalytic properties.
APPLIED SURFACE SCIENCE
(2024)