Nanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation
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Title
Nanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation
Authors
Keywords
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Journal
ACS Applied Nano Materials
Volume -, Issue -, Pages -
Publisher
American Chemical Society (ACS)
Online
2021-09-23
DOI
10.1021/acsanm.1c01862
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