Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiNxmultilayers

The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layers

(2013) S. Majee et al.   SURFACE & COATINGS TECHNOLOGY

Excellent organic/inorganic transparent thin film moisture barrier entirely made by hot wire CVD at 100 °C

(2012) Diederick Spee et al.   Physica Status Solidi-Rapid Research Letters

Quantitative calcium resistivity based method for accurate and scalable water vapor transmission rate measurement

(2011) Matthew O. Reese et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Electrical calcium test for moisture barrier evaluation for organic devices

(2011) S. Schubert et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Definition of encapsulation barrier requirements: A method applied to organic solar cells

(2011) S. Cros et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Super H2O-barrier film using Cat-CVD (HWCVD)-grown SiCN for film-based electronics

(2011) Hiroshi Nakayama et al.   THIN SOLID FILMS

Deposition of silicon nitride thin films by hot-wire CVD at 100 °C and 250 °C

(2009) P. Alpuim et al.   THIN SOLID FILMS

The impact of water vapor transmission rate on the lifetime of flexible polymer solar cells

(2008) Jens A. Hauch et al.   APPLIED PHYSICS LETTERS

Permeation barrier properties of thin oxide films on flexible polymer substrates

(2008) John Fahlteich et al.   THIN SOLID FILMS

Protection of organic light-emitting diodes over 50000 hours by Cat-CVD SiNx/SiOxNy stacked thin films

(2007) Yohei Ogawa et al.   THIN SOLID FILMS