Gas barrier and mechanical properties of a single-layer silicon oxide film prepared by roll-to-roll PECVD system

Title
Gas barrier and mechanical properties of a single-layer silicon oxide film prepared by roll-to-roll PECVD system
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume -, Issue -, Pages 1800170
Publisher
Wiley
Online
2019-02-26
DOI
10.1002/ppap.201800170

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