The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD

Published 2009 View Full Article

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Title
The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 12, Pages 3499-3502
Publisher
Elsevier BV
Online
2009-01-28
DOI
10.1016/j.tsf.2009.01.065

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