Improvement in the moisture barrier properties and flexibility by reducing hydrogen dangling bonds in SiNx thin films with plasma surface treatment

Published 2019 View Full Article

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Title
Improvement in the moisture barrier properties and flexibility by reducing hydrogen dangling bonds in SiNx thin films with plasma surface treatment
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages 125210
Publisher
Elsevier BV
Online
2019-12-02
DOI
10.1016/j.surfcoat.2019.125210

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