Ultralow Water Permeation Barrier Films of Triad a-SiNx:H/n-SiOxNy/h-SiOx Structure for Organic Light-Emitting Diodes

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Title
Ultralow Water Permeation Barrier Films of Triad a-SiNx:H/n-SiOxNy/h-SiOx Structure for Organic Light-Emitting Diodes
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 12, Issue 28, Pages 32106-32118
Publisher
American Chemical Society (ACS)
Online
2020-06-26
DOI
10.1021/acsami.0c05858

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