Effect of crystallinity on the performance of AlN-based resistive random access memory using rapid thermal annealing

Title
Effect of crystallinity on the performance of AlN-based resistive random access memory using rapid thermal annealing
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 118, Issue 18, Pages 183503
Publisher
AIP Publishing
Online
2021-05-05
DOI
10.1063/5.0046359

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