Effect of O2 plasma treatment on density-of-states in a-IGZO thin film transistors

Title
Effect of O2 plasma treatment on density-of-states in a-IGZO thin film transistors
Authors
Keywords
thin film transistors, oxygen plasma treatment, density-of-states, a-IGZO
Journal
Electronic Materials Letters
Volume 13, Issue 1, Pages 45-50
Publisher
Springer Nature
Online
2016-11-28
DOI
10.1007/s13391-017-6214-6

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