Origin of electrical improvement of amorphous TaInZnO TFT by oxygen thermo-pressure-induced process

Published 2014 View Full Article

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Title
Origin of electrical improvement of amorphous TaInZnO TFT by oxygen thermo-pressure-induced process
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 10, Pages 105104
Publisher
IOP Publishing
Online
2014-02-19
DOI
10.1088/0022-3727/47/10/105104

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