Thermal conductivity and thermal boundary resistance of amorphous Al2O3 thin films on germanium and sapphire

Title
Thermal conductivity and thermal boundary resistance of amorphous Al2O3 thin films on germanium and sapphire
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 24, Pages 245105
Publisher
AIP Publishing
Online
2020-06-23
DOI
10.1063/5.0004576

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