Density and size effects on the thermal conductivity of atomic layer deposited TiO 2 and Al 2 O 3 thin films

Title
Density and size effects on the thermal conductivity of atomic layer deposited TiO 2 and Al 2 O 3 thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 650, Issue -, Pages 71-77
Publisher
Elsevier BV
Online
2018-02-02
DOI
10.1016/j.tsf.2018.01.058

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