High Temperature Thermal Conductivity of Amorphous Al2O3Thin Films Grown by Low Temperature ALD

Title
High Temperature Thermal Conductivity of Amorphous Al2O3Thin Films Grown by Low Temperature ALD
Authors
Keywords
-
Journal
ADVANCED ENGINEERING MATERIALS
Volume 15, Issue 11, Pages 1046-1050
Publisher
Wiley
Online
2013-08-07
DOI
10.1002/adem.201300132

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