Thermal Conductivity and Thermal Boundary Resistances of ALD Al 2 O 3 Films on Si and Sapphire

Published 2017 View Full Article

Authors

Keywords

3<span class=InlineEquation id=IEq12>( omega ), Al<span class=InlineEquation id=IEq13>(_{2}), Atomic layer deposition, Thermal boundary resistance, Thermal conductivity

Journal

INTERNATIONAL JOURNAL OF THERMOPHYSICS

Volume 38, Issue 12, Pages -

Publisher

Springer Nature

Online

2017-10-17

DOI

10.1007/s10765-017-2308-5

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