Thermal conductivity and thermal boundary resistance of amorphous Al2O3 thin films on germanium and sapphire

标题
Thermal conductivity and thermal boundary resistance of amorphous Al2O3 thin films on germanium and sapphire
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 24, Pages 245105
出版商
AIP Publishing
发表日期
2020-06-23
DOI
10.1063/5.0004576

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