Pattern Formation in High Power Impulse Magnetron Sputtering (HiPIMS) Plasmas
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Title
Pattern Formation in High Power Impulse Magnetron Sputtering (HiPIMS) Plasmas
Authors
Keywords
-
Journal
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-12-02
DOI
10.1007/s11090-019-10052-3
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