Self-organization and self-limitation in high power impulse magnetron sputtering

High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

(2012) A. P. Ehiasarian et al.   APPLIED PHYSICS LETTERS

Plasma potential mapping of high power impulse magnetron sputtering discharges

(2012) Albert Rauch et al.   JOURNAL OF APPLIED PHYSICS

Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

(2012) André Anders et al.   JOURNAL OF APPLIED PHYSICS

High power impulse magnetron sputtering discharge

(2012) J. T. Gudmundsson et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

(2011) A Anders et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

(2011) A. V. Kozyrev et al.   PLASMA PHYSICS REPORTS

Noble gas retention in the target during rotating cylindrical magnetron sputtering

(2008) S. Mahieu et al.   APPLIED PHYSICS LETTERS