Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges

Published 2018 View Full Article

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Title
Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2018-09-18
DOI
10.1088/1361-6595/aae236

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